A Scanning Probe Microscope in My Scanning Electron Microscope?
نویسندگان
چکیده
منابع مشابه
Studying of various nanolithography methods by using Scanning Probe Microscope
The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...
متن کاملStudying of various nanolithography methods by using Scanning Probe Microscope
The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...
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ژورنال
عنوان ژورنال: Microscopy Today
سال: 1995
ISSN: 1551-9295,2150-3583
DOI: 10.1017/s1551929500063112